JPH0726365Y2 - 気相表面処理装置用の薬液気化装置 - Google Patents
気相表面処理装置用の薬液気化装置Info
- Publication number
- JPH0726365Y2 JPH0726365Y2 JP77190U JP77190U JPH0726365Y2 JP H0726365 Y2 JPH0726365 Y2 JP H0726365Y2 JP 77190 U JP77190 U JP 77190U JP 77190 U JP77190 U JP 77190U JP H0726365 Y2 JPH0726365 Y2 JP H0726365Y2
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- chemical
- vapor
- carrier gas
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 title claims description 140
- 239000007788 liquid Substances 0.000 title claims description 104
- 239000006200 vaporizer Substances 0.000 title claims description 27
- 238000004381 surface treatment Methods 0.000 title claims description 25
- 239000012808 vapor phase Substances 0.000 title claims description 25
- 239000012159 carrier gas Substances 0.000 claims description 44
- 230000008016 vaporization Effects 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 239000007789 gas Substances 0.000 description 35
- 239000012071 phase Substances 0.000 description 22
- 238000009834 vaporization Methods 0.000 description 7
- 238000010926 purge Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 239000003814 drug Substances 0.000 description 3
- 229940079593 drug Drugs 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP77190U JPH0726365Y2 (ja) | 1990-01-08 | 1990-01-08 | 気相表面処理装置用の薬液気化装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP77190U JPH0726365Y2 (ja) | 1990-01-08 | 1990-01-08 | 気相表面処理装置用の薬液気化装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0392775U JPH0392775U (en]) | 1991-09-20 |
| JPH0726365Y2 true JPH0726365Y2 (ja) | 1995-06-14 |
Family
ID=31504713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP77190U Expired - Lifetime JPH0726365Y2 (ja) | 1990-01-08 | 1990-01-08 | 気相表面処理装置用の薬液気化装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726365Y2 (en]) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4710481B2 (ja) * | 2005-08-17 | 2011-06-29 | 住友化学株式会社 | 有機金属化合物供給容器 |
| JP5602421B2 (ja) * | 2009-12-14 | 2014-10-08 | 三菱電機株式会社 | はんだ接合装置 |
| JP6014829B2 (ja) * | 2012-05-28 | 2016-10-26 | 株式会社渡辺商行 | 気化器 |
| US20180066363A1 (en) * | 2016-09-08 | 2018-03-08 | Tokyo Electron Limited | Vortical atomizing nozzle assembly, vaporizer, and related methods for substrate processing systems |
| JP7258970B2 (ja) * | 2020-09-28 | 2023-04-17 | 株式会社Kokusai Electric | 気化システム、基板処理装置および半導体装置の製造方法 |
-
1990
- 1990-01-08 JP JP77190U patent/JPH0726365Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0392775U (en]) | 1991-09-20 |
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